The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14a-C1-1~11] 7.6 Ion beams

Sat. Mar 14, 2015 9:00 AM - 12:00 PM C1 (6C-104)

10:30 AM - 10:45 AM

[14a-C1-6] Non-contact hardness evaluation of the film by Gas Cluster Ion Beam

〇Masahiro Hayashi1, Noriaki Toyoda1, Isao Yamada1 (1.Hyogo Univ.)

Keywords:gas cluster Ion beam,gcib,hardness evaluation