The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14a-C1-1~11] 7.6 Ion beams

Sat. Mar 14, 2015 9:00 AM - 12:00 PM C1 (6C-104)

11:15 AM - 11:30 AM

[14a-C1-9] Low temperature deposition of carbon film on Ni surface with GCIB irradiation

〇Daichi Nakayama1, Yuki Uozumi1, Noriaki Toyoda1, Isao Yamada1 (1.Hyogo Univ.)

Keywords:gas cluster ion beam,carbon