The 62nd JSAP Spring Meeting, 2015

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Oral presentation

Joint Session K » Joint Session K

[14a-D1-1~9] Joint Session K

Sat. Mar 14, 2015 9:00 AM - 11:30 AM D1 (16-101)

9:15 AM - 9:30 AM

△ [14a-D1-2] Polarity control of ZnO thin films by a RF Magnetron Sputtering Method

〇(M1)Kei Tsunoda1, 2, Takeo Ohsawa2, Naoki Ohashi2, Takamasa Ishigaki1 (1.Hosei Univ., 2.NIMS)

Keywords:ZnO,XPS,Thin film