The 62nd JSAP Spring Meeting, 2015

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Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[14a-D10-1~9] 6.3 Oxide electronics

Sat. Mar 14, 2015 9:30 AM - 11:45 AM D10 (16-305)

9:45 AM - 10:00 AM

[14a-D10-2] Effect of ZnO target temperature on growth of c-axis parallel oriented ZnO film in RF magnetron sputtering

〇Chihiro Takata1, Shinji Takayanagi1, Takahiko Yanagitani2, Mami Matsukawa1 (1.Doshisha Univ., 2.Nagoya Inst. Tech.)

Keywords:ZnO,RF magnetron sputtering,Target temperature