Effects of Firing Atmosphere on Thin Film Characteristics of MOD-Made BaTiO<sub>3</sub> Thin Films for ReRAM

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

Sat. Mar 14, 2015 9:30 AM - 11:45 AM D10 (16-305)

11:30 AM - 11:45 AM

〇Shuhei Hashimoto¹, Toshiyuki Sugie¹, Ziyang Zhang¹, Kaoru Yamashita¹, Minoru Noda¹ (1.Kyoto Inst. Tech)

Keywords:ReRAM,BaTiO3,oxygen vacancy