[14a-D13-1~8] 15.1 Bulk crystal growth

▲ [14a-D13-4] Correlation study on heating profile and carbon contamination during the melting process of Czochralski silicon crystal growth

〇(P)Xin Liu¹, Bing Gao¹, Satoshi Nakano¹, Koichi Kakimoto¹ (1.RIAM, Kyushu Univ.)

Keywords:Czochralski method,Impurities,Computer simulation