The 62nd JSAP Spring Meeting, 2015

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3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[14p-A14-1~8] 3.8 Optical measurement, instrumentation, and sensor

Sat. Mar 14, 2015 1:00 PM - 3:00 PM A14 (6A-103)

1:00 PM - 1:15 PM

[14p-A14-1] Extracting ellipsometry parameters under window effect using quasi-Newton method

Lianhua Jin1, 〇(B)Shouki Kasuga1, Eiichi Kondoh1 (1.Univ. of Yamanashi)

Keywords:ellipsometry