The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[14p-A25-1~4] 13.2 Exploratory Materials, Physical Properties, Devices

Sat. Mar 14, 2015 1:00 PM - 2:00 PM A25 (6A-218)

1:00 PM - 1:15 PM

[14p-A25-1] Synthesis of BaSi2 Film using Ammonia Process

〇Takashi Sekiguchi1, 2, Hisanori Yamane3, Jun Chen1, Kentaro Watanabe1, 2, Takashi Suemasu2 (1.NIMS, 2.Univ. Tsukuba, 3.Tohokku Univ.)

Keywords:BaSi2,ammmonia process,EBIC