The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[14p-A29-1~8] 13.4 Si wafer processing /MEMS/Integration technology

Sat. Mar 14, 2015 1:00 PM - 3:00 PM A29 (6A-204)

1:00 PM - 1:15 PM

[14p-A29-1] Si Crystal Growth by a Focused-Light-Heating FZ Method

〇Shinichi Ikeda1, 2, Takeshi Nishimura3, Tetsuya Ozawa4, Tohru Nagasawa3, Seiichi Takasu3, Shiro Hara1, 2 (1.AIST, 2.MINIMAL, 3.Canon Machinery, 4.Rigaku)

Keywords:minimal,crystal growth