The 62nd JSAP Spring Meeting, 2015

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[14p-A29-1~8] 13.4 Si wafer processing /MEMS/Integration technology

Sat. Mar 14, 2015 1:00 PM - 3:00 PM A29 (6A-204)

1:45 PM - 2:00 PM

[14p-A29-4] Evaluation of rapid thermal characteristics using a minimal laser heating furnace

〇kazushige sato1, Haruki Toonoe1, Takashi Chiba1, 3, Masao Terada1, 3, Katsuhiko Nakato1, Noriko Miura1, Shinichi Ikeda1, 2, Sommawan Khumpuang1, 2, Shiro Hara1, 2 (1.Minimal Fab Development Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)

Keywords:laser heating,minimal