[14p-A29-1~8] 13.4 Si wafer processing /MEMS/Integration technology

[14p-A29-4] Evaluation of rapid thermal characteristics using a minimal laser heating furnace

〇kazushige sato¹, Haruki Toonoe¹, Takashi Chiba^{1, 3}, Masao Terada^{1, 3}, Katsuhiko Nakato¹, Noriko Miura¹, Shinichi Ikeda^{1, 2}, Sommawan Khumpuang^{1, 2}, Shiro Hara^{1, 2} (1.Minimal Fab Development Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)

Keywords:laser heating,minimal