The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[14p-A29-1~8] 13.4 Si wafer processing /MEMS/Integration technology

Sat. Mar 14, 2015 1:00 PM - 3:00 PM A29 (6A-204)

2:15 PM - 2:30 PM

[14p-A29-6] Minimal spin coating by controlling local temperature in spin cup

〇Shuuji Okuda1, Sho Takeuchi1, 2, Yoshihisa Sensu1, 2, Takahiro Ito1, 3, Sommawan Khumpuang1, 4, Shiro Hara1, 4 (1.MINIMAL, 2.LTJ, 3.OrientalMotor, 4.AIST)

Keywords:minimal