[14p-A29-1~8] 13.4 Si wafer processing /MEMS/Integration technology

[14p-A29-8] Cleanroom-Free Minimal Air Circulation System for PLAD (IV)

〇Takashi Yajima¹, Masaharu Yasui¹, Khumpuang Sommawan^{1, 2}, Hitoshi Maekawa^{1, 2}, Shiro Hara^{1, 2} (1.MINIMAL, 2.AIST)

Keywords:minimal fab