The 62nd JSAP Spring Meeting, 2015

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Symposium » Materials science of singularity in nitride semiconductors-Growth, processing and electronic application-

[14p-B1-1~6] Materials science of singularity in nitride semiconductors-Growth, processing and electronic application-

Sat. Mar 14, 2015 12:45 PM - 3:00 PM B1 (6B-101)

12:45 PM - 1:15 PM

[14p-B1-1] Introduction of Singular Structure of Group-III Nitrides by HVPE Using a Mixed System of III-Cl and III-Cl3

〇Yoshinao Kumagai1, Rie Togashi1, Quang Tu Thieu2, Hisashi Murakami1, Bo Monemar2, 3, Akinori Koukitu1 (1.Tokyo Univ. of A. & T., 2.TUAT GIRO, 3.Linkoping Univ.)

Keywords:HVPE,Group-III Nitrides,Singular Structure