The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-C1-1~8] 7.6 Ion beams

Sat. Mar 14, 2015 1:00 PM - 3:00 PM C1 (6C-104)

1:00 PM - 1:15 PM

[14p-C1-1] Oxidation State of Ge Nanoparticles Formed in SiO2 Layer by Negative-Ion Implantation

〇Hiroshi Tsuji1, Mikio Kato2, Tomokazu Sasaki2, Eiichi Nomura3, Yasuhito Gotoh1 (1.Kyoto Univ., 2.Toshiba Nanoanalysis, 3.Kaihatsu-Jyutaku 21)

Keywords:Nano-particles,Oxidation state,Core-Shell structure