[14p-C1-1~8] 7.6 Ion beams

[14p-C1-3] Irradiation Effects of Polyatomic Molecular Hydrocarbon Ion Beams on Solid and Liquid Surfaces

〇Isayu Nagayama¹, Kyohei Hayashi¹, Mitsuaki Takeuchi¹, Hiromichi Ryuto¹, Gikan Takaoka¹ (1.Kyoto Univ.)

Keywords:silicon,ionic liquid,thin film