The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-C1-1~8] 7.6 Ion beams

Sat. Mar 14, 2015 1:00 PM - 3:00 PM C1 (6C-104)

1:45 PM - 2:00 PM

[14p-C1-4] Sputtering Characteristics of Ionic Liquid EMIM-DCA Ion Beams

〇Yuki Hoshide1, Mitsuaki Takeuchi1, Hiromichi Ryuto1, Gikan Takaoka1 (1.Kyoto Univ.)

Keywords:Ionic Liquid