The 62nd JSAP Spring Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-C1-1~8] 7.6 Ion beams

Sat. Mar 14, 2015 1:00 PM - 3:00 PM C1 (6C-104)

2:00 PM - 2:15 PM

[14p-C1-5] Secondary Ion Mass Spectrometry (SIMS) of Organic Samples Using Ionic-liquid Beam Irradiation

〇Yukio Fujiwara1, Naoki Saito1 (1.AIST)

Keywords:secondary ion mass spectrometery,inoic liquid,SIMS