The 62nd JSAP Spring Meeting, 2015

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1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Instrumentation, measurement and Metrology

[14p-D12-1~5] 1.6 Instrumentation, measurement and Metrology

Sat. Mar 14, 2015 1:00 PM - 2:15 PM D12 (16-501)

1:30 PM - 1:45 PM

[14p-D12-3] Development of particle-number standard wafers for calibrating wafer-surface-scanners

〇Naoko Tajima1, Kenjiro Iida1, 2, Kensei Ehara2, Sommawan Khumpuang1, 2, Shiro Hara1, 2 (1.MINIMAL, 2.AIST)

Keywords:Particle number,Wafer surface scanner