The 62nd JSAP Spring Meeting, 2015

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17 Nanocarbon Technology » 17.4 Device applications

[14p-D7-1~6] 17.4 Device applications

Sat. Mar 14, 2015 1:00 PM - 2:30 PM D7 (16-207)

1:30 PM - 1:45 PM

△ [14p-D7-3] Large Variability of Contact Resistance in Au/Cr/MoS2 System and Its Suppression by Cr Thinning

〇Kosuke Sano1, Tsunaki Takahashi1, 2, Ken Uchida1, 2 (1.Dept. Electronics and Electrical Eng., Keio Univ, 2.CREST, Japan Science and Technology Agency)

Keywords:MoS2,contact,thermal stress