Tomoki Oku

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:30 AM - 11:30 AM P4 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-P4-1~8] 13.3 Insulator technology

9:30 AM - 11:30 AM

[16a-P4-4] Surface oxidation process of silicon nitride films under humid environment

〇Tomoki Oku¹, Toshihiko Shiga¹, Masahiro Totsuka¹, Shinichi Takagi¹ (1.Mitsubishi Electric)