Etsuo Maeda

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 1:30 PM - 3:30 PM P4 (Exhibition Hall)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[13p-P4-1~4] 7.5 Ion beams

1:30 PM - 3:30 PM

[13p-P4-3] Study of direct nano patterning on gold and silicon surfaces with helium ion microscope

〇Etsuo Maeda¹, Reo Kometani¹, Tomohiko Iijima², Shinji Migita², Shinichi Ogawa² (1.The Univ. of Tokyo, 2.AIST)