Isao Kimura

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 10:00 AM - 11:45 AM A23 (201B)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[13a-A23-1~7] 6.1 Ferroelectric thin films

10:30 AM - 10:45 AM

[13a-A23-3] Fabrication and Evaluation of Piezoelectric Film by Compact Sputtering System

〇Isao Kimura¹, Hiroki Kobayashi¹, Tatsuro Tsuyuki¹, Takehito Jimbo¹, Koukou Suu¹, Hiroshi Sugita², Kenji Watanabe² (1.ULVAC, Inc., 2.ULVAC Kyusyu Corp.)

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