Taku Suyama

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:30 PM - 3:30 PM P6 (Exhibition Hall)

Poster presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[15p-P6-1~16] 8.3 deposition of thin film and surface treatment

1:30 PM - 3:30 PM

[15p-P6-7] Evaluation of Oxygen Negative Ion Flux in ITO Magnetron Sputtering

〇Taku Suyama¹, Bae Hansin¹, Setaka Kenta¹, Kensuke Sasai¹, Haruka Suzuki¹, HIrotaka Toyoda^1,2 (1.Nagoya Univ., 2.PLANT, Nagoya Univ.)