Atsushi Hiraiwa

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 10:15 AM - 11:45 AM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15a-B9-1~6] 13.3 Insulator technology

10:45 AM - 11:00 AM

[15a-B9-3] Annealing effect on electric characteristics of atomic-layer-deposition Al₂O₃ films

〇Atsushi Hiraiwa^1,3, Daisuke Matsumura², Satoshi Okubo², Hiroshi Kawarada^1,2 (1.RONL, Waseda Univ., 2.FSE, Waseda Univ., 3.IMaSS, Nagoya Univ.)