Takumi Hadano

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 5:45 PM B9 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-B9-1~17] 13.3 Insulator technology

4:30 PM - 4:45 PM

[15p-B9-13] The effect of Post Metallization Annealing for GeO2/Ge structure using CVD method

〇Takumi Hadano¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. of Agri & Tech)