17:15 〜 17:30 ▼ [13p-A37-12] Multifunctional Phosphonic Acid Self-Assembled Monolayer for Metal Patterningand Ultrathin Gate Dielectrics in Fabrication of MoS2 Field-Effect Transistors 〇Wanjing Du1、Kawanago Takamasa1、Oda Shunri1 (1.Tokyo Tech.QNERC)