RYOKO SUGANO

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 11:45 AM B9 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[13a-B9-1~11] 8.4 Plasma etching

9:45 AM - 10:00 AM

[13a-B9-4] Molecular dynamics simulation of surface reactions in atomic layer etching (ALE) of SiN

〇RYOKO SUGANO¹, MICHORO ISOBE², SATOSHI HAMAGUCHI² (1.Hitachi., Ltd., 2.Osaka Univ.)