Reo Kometani

→ Search for Reo Kometani in Google Scholar

Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P5 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[14p-P5-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

1:30 PM - 3:30 PM

[14p-P5-9] Aluminium-assisted chemical vapor etching of silicon dioxide, and its characterization

〇Reo Kometani¹, Takahiro Murakami¹, Etsuo Maeda¹ (1.The Univ. of Tokyo)