Alexandre FIORI

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:15 PM - 5:45 PM A26 (203-204)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[14p-A26-1~16] 6.2 Carbon-based thin films

1:45 PM - 2:00 PM

▲ [14p-A26-3] Study of TMB/CH₄/O₂/H₂ plasmas for diamond doped multilayers

〇Alexandre FIORI¹, Tokuyuki TERAJI¹ (1.NIMS)