Shuichi Nagasawa

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:15 PM - 5:00 PM D61 (Bandaijima Bldg.)

Oral presentation
| 11 Superconductivity
| 11.5 Junction and circuit fabrication process, digital applications

[15p-D61-1~14] 11.5 Junction and circuit fabrication process, digital applications

1:45 PM - 2:00 PM

[15p-D61-3] Yield Improvement of Nb 9-layer Advanced Process using PECVD SiO₂ insulator

〇Shuichi Nagasawa¹, Mutsuo Hidaka¹ (1.AIST)