Masao Noma

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:15 PM - 4:45 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.3 deposition of thin film and surface treatment

[16p-B7-1~13] 8.3 deposition of thin film and surface treatment

4:30 PM - 4:45 PM

[16p-B7-13] Improved adhesion property of c-BN films by plasma-enhanced nitridation under Reactive Plasma-Assisted Coating (RePAC)

〇Masao Noma¹, Michiru Yamashita², Koji Eriguchi³, Shigehiko Hasegawa⁴ (1.SHINKO SEIKI. Co., LTD., 2.Hyogo Prefectural Institute of Technology, 3.Kyoto Univ., 4.Osaka Univ.)

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