Hiroki Yamamoto

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

9:30 AM - 9:45 AM

[13a-D61-3] Systematic Study of the Response of Resist Materials Based on Noria Derivatives Modified with Various Protection Ratios of Acetal Moieties to Electron Beam Irradiation

〇Hiroki Yamamoto¹, Hiroto Kudo², Kozawa Takahiro¹ (1.ISIR, Osaka Univ., 2.Kansai Univ.)