Takashi Matsukawa

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Speaker, Author, Co-Author

Tue. Sep 13, 2016 1:45 PM - 5:00 PM B13 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[13p-B13-1~12] 13.5 Semiconductor devices and related technologies

3:00 PM - 3:15 PM

[13p-B13-6] Fluctuation of FinFET parasitic resistance: Impact of extension doping condition

〇Takashi Matsukawa¹, Takahiro Mori¹, Yukinori Morita¹, Shintaro Otsuka¹, Yongxun Liu¹, Shinichi O'uchi¹, Hiroshi Fuketa¹, Shinji Migita¹, Meishoku Masahara¹ (1.AIST)

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