Daisuke Yamane

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Speaker, Author, Co-Author

Wed. Sep 14, 2016 1:30 PM - 3:30 PM P5 (Exhibition Hall)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[14p-P5-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

1:30 PM - 3:30 PM

[14p-P5-2] A Study on Multi-layer Metal MEMS Accelerometer for Sub-1mG Detection

〇Daisuke Yamane^1,4, Toshifumi Konishi², Teruaki Safu², Masato Sone^1,4, Hiroshi Toshiyoshi^3,4, Kazuya Masu^1,4, Katsuyuki Machida^2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

1:30 PM - 3:30 PM

[14p-P5-3] A Study on Multi-layer Metal MEMS Accelerometer with Differential Sensing Structure

〇Daisuke Yamane^1,4, Toshifumi Konishi², Teruaki Safu², Hiroyuki Ito^1,4, Shiro Dosho^1,4, Noboru Ishihara^1,4, Masato Sone^1,4, Hiroshi Toshiyoshi^3,4, Kazuya Masu^1,4, Katsuyuki Machida^2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

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