Katsuya Suzuki

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 12:15 PM C32 (Nikko Kujaku CD)

Oral presentation
| 3 Optics and Photonics
| 3.8 Optical measurement, instrumentation, and sensor

[16a-C32-1~12] 3.8 Optical measurement, instrumentation, and sensor

12:00 PM - 12:15 PM

[16a-C32-12] Ellipsometric evaluation of particles attached to Si wafer surface

〇(M1C)Katsuya Suzuki¹, Eiichi kondoh¹, Mitsuhiro Watanabe¹, Lianhua Jin¹, Satomi Hamada², Shouhei Shima², Hirokuni Hiyama² (1.Yamanashi Univ., 2.Ebara Corp.)

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