Investigation of damage evolution process of GaN during plasma exposure

Presentation information

Oral presentation

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

Tue. Sep 13, 2016 9:00 AM - 11:45 AM B7 (Exhibition Hall)

Makoto Matsui(Shizuoka Univ.)

9:00 AM - 9:15 AM

〇(M2)Yoshitsugu Banno¹, Daisuke Ogawa¹, Keiji Nakamura¹ (1.Chubu Univ.)

Keywords:Plasma Induced Damage, Photoluminescence, chlorine