[13a-D62-1~11] 6.4 Thin films and New materials

[13a-D62-9] DUV CL properties of cubic Mg_xZn_1−xO alloy films and superlattice structures

〇Hideyuki Imabeppu¹, Takayoshi Oshima¹, Mai Hattori¹, Michito Nakatani², Toshihisa Suyama², Kouhei Yoshimatsu¹, Akira Ohtomo^1,3 (1.Tokyo Tech., 2.Tokuyama Corp., 3.MCES.)

Keywords:Deep ultraviolet luminescence, MgZnO

Recently, the solid-type Deep UltraViolet (DUV) light sources have been developed instead of a mercury lamp. In this presentation, we focused on cubic Mg_xZn_1-xO and grew its thin films and Mg_xZn_1-xO/MgO superlattices. Our cathode luminescence measurements revealed that the band-edge-luminescence peaks appeared in Mg_xZn_1-xO films and superlattices. Furthermore, intensity of the luminescence peaks was enhanced for the superlattice specimens.