Improvement of reproducibility of MOMBE GaN using in-situ low-pressure nitrogen microplasma treatment

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

Tue. Sep 13, 2016 1:15 PM - 6:00 PM A21 (Main Hall A)

Tsutomu Araki(Ritsumeikan Univ.), Munetaka Arita(Univ. of Tokyo), Hisashi Murakami(TUAT)

2:30 PM - 2:45 PM

〇yasuhiro kusakabe¹, Takahiro Maruyama¹, Kazuo Shimizu², Shigeya Naritsuka¹ (1.Meijo Univ., 2.Shizuoka Univ.)

Keywords:GaN, MOMBE