1:15 PM - 2:15 PM
[13p-A22-1] Why a-IGZO TFT is used for mass production
Keywords:Amorphous Oxide Semiconductor, Thin-Film Transistor, Mass Production
Amorphous oxide semiconductor (AOS) thin-film transistor (TFT) was first reported in 2004, and Sharp succeeded in mass production for flat-panel displays in 2012. This is the first case for oxides that an oxide is mass produced as an active layer of a semiconductor device. In this paper, we like to review and discuss why AOS is successuflly used for practical devices in comparison with other oxide and related materials and technologies.