The 77th JSAP Autumn Meeting, 2016

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[13p-A26-1~16] 6.2 Carbon-based thin films

Tue. Sep 13, 2016 1:15 PM - 6:00 PM A26 (203-204)

Hiroshi Kawarada(Waseda Univ.), Junko Hayase(Keio Univ.), Satoshi Yamasaki(AIST)

2:00 PM - 2:15 PM

△ [13p-A26-4] Nitrogen –Vacancy Centers in Diamond on Micropatterned Substrate fabricated using RIE and FIB

〇Ikuya Hanano1, Ryushiro Fujita1, Hideyuki Watanabe2, Kouichi Akahane3, Junko Hayase1 (1.Keio Univ., 2.AIST, 3.NICT)

Keywords:Nitrogen Vacancy Centers in Diamond, reactive ion etching, focused ion beam etching