[13p-A32-1~8] Active Woman Researchers in the Field of Surface and Thin Film

[13p-A32-4] Operando analysis of interfaces in energy devices using a high spatial resolution scanning photoelectron microscopy with synchrotron radiation soft X-ray

〇Naoka Nagamura¹, Koji Horiba², Oshima Masaharu³ (1.NIMS, 2.IMSS, KEK, 3.SRRO, Univ. of Tokyo)

Keywords:synchrotron radiation, photoemission spectroscopy, interface

Imaging analysis is important to investigate electronic states, structures, and reactions at surfaces and interfaces of nanostructures. We have developed a synchrotron radiation soft X-ray scanning photoelectron microscopy system called "3D nano-ESCA" at SPring-8. This system enables us to measure buried interfaces nondestructively with high spatial and enegy resolution. Furthermore, "operando analysis", i.e. measurements during device operation, can be performed. I will introduce the 3D nano-ESCA mechanical system and results of device analysis with our struggles at experiments.