[13p-B12-1~18] 2.2 Detection systems

[13p-B12-15] Development of polycapillary optics for a scanning transmission electron microscope – transition edge sensor (STEM–TES)

〇Akira Takano¹, Keisuke Maehata¹, Naoko Iyomoto¹, Yukiko Tsuru¹, Toru Hara², Kazuhisa Mitsuda³, Noriko Yamasaki³, Keiichi Tanaka⁴ (1.Kyushu Univ., 2.NIMS, 3.JAXA, 4.Hitachi High-Tech Science)

Keywords:Polycapillary, TES microcalorimeter, STEM

An energy-dispersive spectrometer (EDS) with a superconducting transition edge sensor (TES) microcalorimeter mounted on a scanning transmission electron microscope (STEM) has been developed to enhance the accuracy of nanoscale material analysis. We used polycapillary optics to collect X-rays. Using original simulation code, we designed new polycapillary optics for multi pixel TES microcalorimeter.