[13p-B12-1~18] 2.2 Detection systems

[13p-B12-8] IGZO-TFT preamp and analog counter for large area photon counting X-ray detector

〇Kenji Shimazoe¹, Akihiro Koyama¹, Hiroyuki Takahashi¹, Hiroaki Miyoshi² (1.The Univ. of Tokyo, 2.SHARP)

Keywords:IGZO, Photon Counting, Thin Film Transistor

IGZO (indium gallium zinc oxide) semiconductor TFT (thin film transistor) is commonly used for large area flat-panel display as switching and this technology also has an advantage for making a large area detector. A prototype of 8 x 8 pixel detector based on IGZO charge sensitive preamplifier (CSA) and analog counter was designed and fabricated for future photon counting radiation system, such as CT. The size of pixel in fabricated array is 1.5 mm x 1.5 mm and whole size is 12mm x 12 mm. The basic performance of fabricated electronics will be reported.