4:30 PM - 4:45 PM
[13p-C31-10] Fabrication of the SnO2 bubble target for laser produced plasma source
Keywords:EUV, plasma, material
Oral presentation
7 Beam Technology and Nanofabrication » 7.1 X-ray technologies
Tue. Sep 13, 2016 1:45 PM - 5:00 PM C31 (Nikko Kujaku AB)
Takeshi Higashiguchi(Utsunomiya Univ.), Atsushi Sunahara(Inst. for Laser Tech.)
4:30 PM - 4:45 PM
Keywords:EUV, plasma, material