[13p-C31-1~11] 7.1 X-ray technologies

[13p-C31-3] Diffraction efficiency measurements on a grating in 5–10 nm region at BL-11D of the Photon Factory

〇Tadashi Hatano¹, Masato Koike², Ryuichi Ukita³, Hiroyuki Sasai³, Tetsuya Nagano³ (1.IMRAM, Tohoku Univ., 2.QuBS, QST, 3.Device, Shimadzu)

Keywords:grating, diffraction efficiency, soft X-ray

We performed diffraction efficiency measurements on a standard soft X-ray grating. The spectral dispersion was measured in the 5 – 10 nm wavelength region with angle of incidence fixed at 87°. Results agreed with calculated values. The angular dispersion was also measured with wavelength fixed at 6.76 nm, B-K emission. The product of the diffraction efficiency and the numerical aperture is three times higher at 83° angle of incidence than at 87°.