The 77th JSAP Autumn Meeting, 2016

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-D62-1~14] 6.4 Thin films and New materials

Tue. Sep 13, 2016 1:45 PM - 5:30 PM D62 (Bandaijima Bldg.)

Tetsuo Tsuchiya(AIST), Masami Nishikawa(Nagaoka Univ. of Tech.)

4:15 PM - 4:30 PM

[13p-D62-10] Yttria Stabilized Zirconia (YSZ) films formed by atmospheric chemical vapor deposition technique

〇Taisuke Kobori1, Keiji Komatsu1, Hidetoshi Saitoh1 (1.Nagaoka Univ. Tech.)

Keywords:atmospheric chemical vapor deposition technique