[13p-D62-1~14] 6.4 Thin films and New materials

[13p-D62-4] Observation of RHEED oscillation of Fe_3-xO₄ (001) thin films deposited by reactive sputtering technique

Taisuke Ojima¹, Tainosho Takeshi¹, Sonia Sharmin¹, 〇Hideto Yanagihara¹ (1.Univ. Tsukuba)

Keywords:reactive sputtering, RHEED, layer-by-layer growth

Atomically flat Fe_3-xO₄ (001) (x=0, 0.33) epitaxial films with magnetic properties as good as the bulk ones can be grown by reactive magnetron sputtering technique. We have observed in situ RHEED oscillations during Fe_3-xO₄ (001) thin-film growth process by reactive magnetron sputtering. The oscillation period corresponds to the thickness of single layer molecule of Fe_3-xO₄ stacking on (001) planes.