[13p-P1-1~8] 1.6 Ultrasonics

[13p-P1-3] RF excitation properties of SAW by interdigital transducer on GaAs substrate -effects of reflection of SAW by electrode fingers and irregularity of electrode structure

〇Daichi Mitsuhashi¹, Kazuyuki Matsutomo¹, Hiroyuki Bando¹, Toshio Matsusue¹ (1.Chiba Univ.)

Keywords:surface acoustic wave (SAW), GaAs, interdigital transducer (IDT)