[13p-P1-1~8] 1.6 Ultrasonics

[13p-P1-5] Measurements of vibration frequency using impedance-loaded SAW sensor

Hiroaki Sato¹, Masaki Oishi¹, 〇Jun Kondoh¹ (1.Shizuoka University)

Keywords:SAW, Impedance-loaded SAW sensor

An impedance-loaded surface acoustic wave (SAW) sensor is realized by using a SAW device and a classical sensor. In this paper, the vibration frequency of a cantilever is measured using the impedance-loaded SAW sensor. Moreover damaged cantilever is also measured using it. The measured results indicate that the damage of the cantilever can be estimated by the impedance-loaded SAW sensor.